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A W-band, high-gain, hybrid slot antenna array based on bulk silicon MEMS technology is proposed in this paper. slot lt88 The high-order-mode cavity is explored to excite the 2 × 2-slot basic unit, so as to reach the low-profile requirement of the bulk silicon MEMS process To avoid the fragile structure of the large-scale antenna arrays based on the bulk silicon MEMS process, the ridge gap waveguide